主要规格及技术指标

• step height repeatability 4 Angstrom, 1 sigma on 1um
step
业内一流的台阶高度重复性4埃，1σ* 1um 台阶上
• Manual X/Y stage，with 4inches of travel
手动样品台，6英寸，XY 行程100mm*100mm
• Scan length from 50μm to 55mm with up to 120,000
data points per scan
扫描长度：50μm 至 55mm，可达120,000个数据点/扫描
• Stylus force from 1mg to 15 mg. with Quick-Change
stylus replacement
探针加力范围：1毫克至15毫克，探针快速更换附件（标
配）
• Vertical measurement range: 1mm maximum
垂直测量范围：可达1毫米
• 30 analytical functions, plus waviness cut-off filters
30种分析功能，另加波纹过滤功能
• 3.1Mpixel color camera with selectable magnification
310万像素真彩高清光学 CCD 摄像头
• Step Detection feature for automatically leveling,
detecting, measuring and comparing multiple steps

主要功能及特色

Stylus Profiler is an analytical instrument used in the fields of chemistry, materials science, electronics and communication technology, and chemical engineering. Analyze the large-sized three-dimensional morphology of the sample surface and detect the thickness of the sample.
Brooke's new DektakXTL probe profilometer system can accommodate up to 350mm * 350mm samples, applying Dektak's intended repeatability and reproducibility to the large-sized chip and panel manufacturing industry. The DektakXTL integrated gas isolation device and convenient interactive locking device enable the instrument to operate in a fully enclosed working environment, making it an ideal choice for today's demanding production environments. Its dual camera setup enhances the sense of space, and its high level of automation can produce a high volume.
台阶仪是一种用于化学、材料科学、电子与通信技术、化学工程领域的分析仪器。分析样品表面大尺寸三维形貌，探测样品厚度。
布鲁克公司的新型DektakXTL探针式轮廓仪系统可容纳多大350mm*350mm的样品，将Dektak有意的可重复性和再现性应用于大尺寸晶片及面板制造业。DektakXTL集成气体隔振装置和方便的交互锁装置使仪器在全封闭工作环境下运行，是当今要求苛刻的生产环境的理想之选。它的双摄像头设置使空间感增强，其高水平自动化可生产量。

主要附件及配置

voltage and cabling for Europe type 220V
两相 220-240V,50-60 HZ 电源线
Environmental Enclosure
保护罩
STYLUS, LIS 3, 2um RADIUS, RED/WHITE COLOR CODED- Type B
LIS 3 B 性探针，半径2微米，红/白色
Calibration Standard, nominal 960nm
1UM 标准校准模块
Air floating isolation optical platform ZDT-P-MOT-F009006
气浮隔振光学平台 ZDT-P-MOT-F009006