主要规格及技术指标

1. Number of vacuum chambers: single chamber, stainless steel bucket
shaped vertical structure, front door form
2. Vacuum chamber specification: Φ 600mm x H600mm
3. Extreme vacuum degree: ≤ 6.7 × 10-5Pa
4. Extraction rate: Starting from the atmosphere, it takes ≤ 40 minutes to evacuate to 9 × 10-4Pa
5. Static boosting: After the system stops pumping and shuts down for 12 hours, the vacuum degree is ≤ 5Pa
6. Electron beam evaporation unit configuration [TELEMARK 264-12/ST-6, USA]
Maximum power: 6KW
Anode voltage: -4KV~-10KV, continuously adjustable
Beam current: 0-600mA @ 10kV, 0-750mA @ 8kV
Electron beam deflection angle: 270 ° (e-type)
Beam spot scanning: The deflection current in the X and Y directions is adjustable to ± 1.5A, equipped with a handheld wired operation box
Number and capacity of crucibles: 6 15cc capacity crucibles with automatic baffles, crucibles can automatically rotate and position
7. Film thickness monitoring system:
Monitoring thickness display range: 0~99 μ 9999 Å
真空室数量：单室，不锈钢桶形立式结构，前开门形式；
真空室规格：φ600mm×H600mm
极限真空度：≤6.7×10⁻⁵Pa
抽气速率：从大气开始，抽至 9×10⁻⁴Pa 的时间≤40 分钟
静态升压：系统停泵关机 12 小时后，真空度≤5Pa
电子束蒸发装置配置[美国 TELEMARK 264-12/ST-6]
最大功率：6KW
阳极电压：-4KV~-10KV，连续可调
束流：10kV 时 0-600mA，8kV 时 0-750mA
电子束偏转角：270°（e 型）
束斑扫描：X、Y 方向偏转电流 ±1.5A 可调，配备手持有线操作盒
坩埚数量及容量：6 个 15cc 容量坩埚（带自动挡板），坩埚可自动旋转定位
膜厚监测系统：
监测厚度显示范围：0~99μ9999Å

主要功能及特色

测试

主要附件及配置

无