主要规格及技术指标

真空系统：干泵：≥600m3/h; 调压阀VAT 61234 APC; 英福康工艺薄膜规
腔体：进口6061铝合金，本色阳极氧化处理
热台：双驱加热；控温精度: ± 1% 设定值；热台温度范围：120℃-400℃
射频系统：高频电源AE 13.56MHz 1.5KW ，低频电源AE 400kHz 2KW，自动匹配器
气柜：Horiba MFC ， Fujikin 管路阀件；7*MFC：N2、Ar、SiH4、N2O、NH3、CF4、O2或者Ar & NF3 for RPS

Vacuum system: dry pump: ≥600m3/h; Regulator VAT 61234 APC; Infukang process film gauge
Cavity: imported 6061 aluminum alloy, natural anodizing
Hot table: dual-drive heating; Temperature control accuracy: ± 1% of set value; Hot table temperature range: 120°C-400°C
RF system: high frequency power supply AE 13.56MHz 1.5KW, low frequency power supply AE 400kHz 2KW, automatic matcher
Gas Cabinets: Horiba MFC, Fujikin Line Valves; 7*MFC: N2, Ar, SiH4, N2O, NH3, CF4, O2, or Ar & NF3 for RPS

主要功能及特色

PSG沟槽填充;波导侧壁保护;热光可选择和可调谐滤波器;磁隧道结（MTJ）侧壁保护SiN工艺稳定性;宽泛的氮化硅应力调节能力
PSG trench filling; waveguide sidewall protection; Thermo-optical selectable and tunable filters; Magnetic Tunnel Junction (MTJ) sidewall protects SiN process stability; Broad silicon nitride stress regulation capabilities

主要附件及配置

无