主要规格及技术指标

Triton-40TM 是面向研发与工业客户使用需求设计的等离子处理系统，适用于等离子清洗、活化以及刻蚀等多种应用。设备可在严苛环境下稳定运行，获得高度均一化的处理效果。Triton-40TM 为紧凑的桌面型等离子系统，易于安装与调试；其灵活的电极配置与气体分布方案可确保在不同产品、不同工艺间的快速转换；直观、高效的操作界面可以帮助使用者使用自动或手动模式运行多种等离子工艺，并兼具强大的工艺菜单编辑、系统参数设定和工艺数据读取等功能。是一款经济高效，便于维护，操作性优秀的等离子处理系统。
Triton-40TM is a plasma treatment system designed for the needs of R&D and industrial customers, suitable for various applications such as plasma cleaning, activation, and etching. The equipment can operate stably in harsh environments and achieve highly uniform processing effects. Triton-40TM is a compact desktop plasma system that is easy to install and debug; Its flexible electrode configuration and gas distribution scheme ensure rapid conversion between different products and processes; The intuitive and efficient operation interface can help users run multiple plasma processes in automatic or manual mode, and has powerful functions such as process menu editing, system parameter setting, and process data reading. It is an economical, efficient, easy to maintain, and highly operable plasma processing system.

主要功能及特色

供电要求 220VAC, 10A, 50Hz, Single Phase, 3 Wire
工艺气体要求 1/4 英寸卡套接口 / 15~30 psig
工艺气体种类及纯度 CF4 = 99.97%; O2 = 99.996%; N2 = 99.99%;
Ar = 99.999%; 其余气体请咨询 JET PLASMA
吹扫气体要求 1/4 英寸卡套接口 / 15~30 psig
吹扫气体种类及纯度 工业级氮气 = 98% 或压缩空气
系统尺寸 长*宽*高 635W x 850D x 690H mm
腔体
长*宽*高 340W x 280H x 456D mm
容积 43 L
最大电极数量 4
电极间距 48 mm
功率电极有效面积 226W x 320D mm
接地电极有效面积 300W x 320D mm
Power supply requirements: 220VAC, 10A, 50Hz, Single Phase, 3 Wire
Process gas requires 1/4 inch card sleeve interface/15-30 PSI
Type and purity of process gas CF4=99.97%; O2 = 99.996%; N2 = 99.99%;
Ar = 99.999%; For other gases, please consult JET PLASMA
Gas blowing requires 1/4 inch card sleeve interface/15-30 PSI
Type and purity of blowing gas: Industrial grade nitrogen=98% or compressed air
System dimensions: length * width * height 635W x 850D x 690H mm
cavity
Length * Width * Height 340W x 280H x 456D mm
Capacity 43 L
Maximum number of electrodes 4
Electrode spacing 48 mm
Effective area of power electrode 226W x 320D mm
Effective area of grounding electrode 300W x 320D mm

主要附件及配置

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