仪器分类
Low Pressure Chemical Vapor Deposition_低压化学气相沉积
Low Pressure Chemical Vapor Deposition_低压化学气相沉积
仪器编号
2024052100100
SN序列号
3CV230
生产厂家
合肥科晶
型号
OTF-1200X-80-II-3CV-SL
制造国家
中国
分类号
放置地点
TC-C building C-1001
购置日期
2023-04-19
入网日期
2024-09-12

主要规格及技术指标

OTF-1200X-80-II-3CV-SL 是一款双温区 LPCVD 的管式炉系统,组成部分为可滑动的双温区滑轨炉,供气系统和真空系统。滑动炉OTF-1200X-II 以电阻丝为加热元件,采用双层壳体结构和 30 段程序控温,K 型热电偶,炉膛采用高纯氧化铝纤维材料,此款设备可用于生长纳米线或用 CVD 方法来制备各种薄膜。

双温区滑轨炉 : 电源:AC220V/50HZ
· 功率:3.0KW
· 加热区长度:200mm*2
· 最高温度:1200 度(≤30min)
· 工作温度:1100 度
· 热电偶:K 型
· 智能化仪表,PID 控制,30 段程序控温
· 滑轨长度:1500mm
· 炉体可滑动距离:600mm
· 炉体为电动控制滑动,炉体滑动速度:1-70mm/s(可调)
· 炉子两端需要各配套上 1 个石英管堵

The OTF-1200X-80-II-3CV-SL is a tube furnace system with dual zone LPCVD consisting of a sliding dual zone slide furnace, gas supply system and vacuum system. The sliding furnace OTF-1200X-II uses a resistance wire as a heating element, a double-layer housing structure with 30-stage temperature programming, a type K thermocouple, and a furnace chamber made of high-purity alumina fiber material, which can be used to grow nanowires or prepare various thin films by CVD method.

Dual Zone Slide Furnace: Power supply: AC220V/50HZ
· Power: 3.0KW
· Heating zone length: 200mm*2
· Maximum temperature: 1200 degrees Celsius (≤30min)
· Operating temperature: 1100 degrees
· Thermocouples: Type K
· Intelligent instrument, PID control, 30-stage program temperature control
· Slide length: 1500mm
· Furnace sliding distance: 600mm
· The furnace body is electrically controlled sliding, and the sliding speed of the furnace body: 1-70mm/s (adjustable)
· Each end of the furnace needs to be plugged with 1 quartz tube

主要功能及特色

· 可通过炉体滑动来实现快速升降温的效果。
· 加热炉采用两个加热温区,可实现一定度数的温差。
· 炉膛材料采用高纯氧化铝纤维,能最大程度减少能量损失
· The furnace body can be slid to achieve a rapid temperature rise and fall effect.
· The heating furnace adopts two heating temperature zones, which can achieve a certain temperature difference.
· The furnace chamber is made of high-purity alumina fiber, which minimizes energy loss

主要附件及配置

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