主要规格及技术指标

温度范围：最高可达150/300°C；可设阶梯温度值30个阶段，单个阶段定时最长可达10小时（600分钟）；可储存20个程序进行调用；温度均匀性±2%

Temperature Range: Up to 150/300°C
Programmable Temperature Steps: Up to 30 stages, with a maximum duration of 10 hours (600 minutes) per stage;
Program Storage: Capable of storing and recalling up to 20 programs;
Temperature Uniformity: ±2%.

主要功能及特色

SPHP-8可编程热板是用于半导体加工通用设备，可编程热板是可编写温度程序进行PID阶梯温度控制和手动加热控制，同是也可储存20个工艺程序进行调用。其应用领域包括：MEMS器件制造特种半导体器件制造。SPHP-8可编程热板支持“快捷模式”及“程序模式”两种加热方式

The SPHP-8 Programmable Hot Plate is a versatile equipment used in semiconductor processing. It allows for programmable temperature settings with PID step temperature control and manual heating control. Additionally, it can store and recall up to 20 process programs. Its application areas include MEMS device fabrication and specialized semiconductor device manufacturing. The SPHP-8 Programmable Hot Plate supports two heating modes: "Quick Mode" and "Program Mode."

主要附件及配置

无