主要规格及技术指标

真空泵 ：高性能旋片泵
抽速：≥4 m3/h
极限真空： <1Pa
工作气压： 4-10 Pa，可恒压控制
抽真空时间： < 3-5 Min
真空规：皮拉尼真空计
腔室尺寸： ~Ø 135 *120 mm（内尺寸）
数显样品台：Ø75mm可偏转数显行星样品台，旋转转速：10-60RPM可调，偏转角度：±40度可调，靶基距40-60mm可调
溅射靶材： 靶材尺寸 Ø 30 * 0.2-0.5mm/2只，可实现单靶溅射、双靶共溅射、双靶交替溅射功能

Vacuum Pump: High-performance rotary vane pump
Pumping Speed: ≥4 m³/h
Ultimate Vacuum: <1 Pa
Operating Pressure: 4-10 Pa, with constant pressure control
Pump-down Time: <3-5 minutes
Vacuum Gauge: Pirani vacuum gauge
Chamber Dimensions: ~Ø135 * 120 mm (internal dimensions)
Digital Display Sample Stage: Ø75mm deflectable digital planetary sample stage
Rotation Speed: Adjustable from 10-60 RPM
Deflection Angle: Adjustable ±40 degrees
Target-Substrate Distance: Adjustable from 40-60 mm
Sputtering Targets: Target Dimensions: Ø30 * 0.2-0.5 mm / 2 pieces
Capabilities: Single-target sputtering, dual-target co-sputtering, and dual-target alternating sputtering

主要功能及特色

可喷镀金属：Au、Pt、Pd、Ir等单金属和任意组份的 Pt-Au、Pt-Pd 合金等
1、双靶磁控溅射阴极：无需换靶、特色叠喷工艺
2、触摸屏一键自动化：使用便捷、省时省心
3、标配模块化旋转偏转样品台：3D粉末类样品喷镀

Sprayable Metals: Single metals such as Au, Pt, Pd, Ir, and dual-target magnetron sputtering cathodes for alloys like Pt-Au and Pt-Pd with any composition.
1.Features a unique layered spraying process without the need for target replacement.
2.One-Touch Automation for Touchscreens: Easy to use, saving time and effort.
3.Standard Modular Rotating Deflection Sample Stage: Designed for 3D powder sample coating.

主要附件及配置

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