主要规格及技术指标

1.XY行程 快速定位行程：210mm×210mm； 精调行程：210mm×210mm ，
2.精调分辨率：≤ 1.0 μm；驱动方式：手动
3.Z轴行程 10mm；驱动方式：手动
4.Theta旋转 快速旋转角度：360°；精调角度：±15°，精调分辨率：＜0.02°；驱动方式：手动
5.Chuck台 尺寸:203mm(8inch) ；真空盘可调节高度：±5mm
6.真空快速切换开关，真空调节档位：Center、2’、4’、8’ 安装方式：真空盘与主体绝缘
7.台面精度 平面度：＜10 μm
8.快速拉出结构 行程：100mm

1.XY stroke Quick positioning stroke: 210mm×210mm; Fine adjustment stroke: 210mm×210mm.
2. Fine adjustment resolution: ≤ 1.0 μm; drive mode: manual
3.Z-axis travel 10mm; drive mode: manual
4. Theta rotation Rapid rotation angle: 360 °; fine-tuning angle: ± 15 °, fine-tuning resolution: < 0.02 °; drive mode: manual
5. Chuck table size: 203mm (8inch); vacuum disk adjustable height: ± 5mm
6. Vacuum quick switch, vacuum adjustment gear: Center, 2', 4', 8' installation mode: vacuum disk and body insulation
7. Table precision Flatness: <10 μm
8.Quick pull-out structure Stroke: 100mm

主要功能及特色

1.GP200包含DC~THZ测试所需的完整配置，能够在最短时间内准确地完成测试要求。提供专业的测试方案，能够实现高品质的I-V、C-V、RF 等测试。
2.GP200拥有稳定且可靠的测试平台，保证测试中的扎针质量。优异的光学系统结合分辨率＜1μm的针座系统，确保扎针的稳定性。在直流应用中，GP200高品质的电缆和三轴信号通路，可使DUT特性分析达到fA级别；射频应用中，通过缩短扩频模块与探针之间连接器的距离，可高效且更好地实现THz内器件高品质参数的提取。优益的三轴低漏点载物台的选件，能够给器件测试带来更多的信心。载物台的单手快速移动及升降、一体化真空开关等优化设计使操作流程更加简洁，不管是初学者还是经验者，使用起来都非常方便、易懂。专门为升级和扩展所设计的各种选项，可轻松实现如负载牵引系统、太赫兹系统、辐照系统、1/f噪声等系统的搭载，GP200系统也可根据您的未来项目需求进行重新配置。

1.GP200 contains the complete configuration required for DC~THZ testing, which can accurately fulfill the testing requirements in the shortest time. It provides professional test solutions that can realize high-quality I-V, C-V, RF and other tests.
2.GP200 has a stable and reliable test platform to ensure the quality of pinning during the test. The excellent optical system combined with a <1μm resolution header system ensures the stability of the pin. In DC applications, the GP200's high-quality cables and triaxial signal path enable DUT characterization up to fA level; in RF applications, by shortening the distance between the connector of the spread spectrum module and the probe, the extraction of high-quality parameters of devices in THz can be efficiently and better realized. The optional 3-axis low leakage stage brings more confidence to device testing. The optimized design of the carrier stage with quick one-handed movement and lifting, and the integrated vacuum switch make the operation flow more concise and easy to use and understand for both beginners and experienced users. A variety of options designed specifically for upgrades and expansions make it easy to piggyback on systems such as load traction systems, terahertz systems, irradiation systems, 1/f noise, etc. The GP200 system can also be reconfigured to meet your future project needs.

主要附件及配置

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