主要规格及技术指标

Chuck ：8，12" 不锈钢，真空吸附型，独立开关控制
Chuck X-Y 轴行程，精度 ：8"x8"，12"x12"1μm
Chuck 旋转角度： 0~360°
Chuck 旋转角度微调精度：0.1°
Chuck升降（选配）：10mm ，1μm精度
Chuck平整度：±5μm
针座平台U 型设计，可放置： 8 个 DMP-200 型针座，快速升降 6mm
针座平台平整度：±5μm
需求：
电力220 VAC, 50Hz
真空-250 mmHg, 7 liter/min
Chuck: 8, 12” stainless steel, vacuum type, independent on/off control
Chuck X-Y axis travel, accuracy: 8 “x8”, 12 “x12” 1μm
Chuck Rotation Angle: 0~360
Chuck rotation angle fine-tuning accuracy: 0.1°.
Chuck lift (optional): 10mm, 1μm accuracy
Chuck flatness: ±5μm
Needle holder platform U-shaped design, can be placed: 8 DMP-200 type needle holders, rapid lifting 6mm
Needle holder platform flatness: ±5μm
Requirements:
Electrical power 220 VAC, 50Hz
Vacuum - 250 mmHg, 7 liter/min

主要功能及特色

PXB 系列探针台是一款功能齐全、兼容性强的探针台，可以满足不同样品的测试，也可满足不同应用的测试，如直流测试、射频测试等；探针台结构稳定，操作方便，包含了样品台快速微调移动、显微镜移动、样品台升降、样品台旋转、针座平台升降、显微镜升降等众多功能，为测试提供了非常便捷的操作；龙门架结构的设计，便于金相显微镜、体式显微镜等不同类型显微镜的更换，也确保了显微镜的移动精度，便于观察样品；针座平台升降装置的设计，改善了操作方法，提升了测试效率。主要应用于半导体行业以及光电行业的测试。广泛应用于复杂、高速器件的精密电气测量的研发。
The design of gantry structure facilitates the replacement of different types of microscopes, such as metallurgical microscope and body microscope, and also ensures the precision of microscope movement, which is convenient for observing the samples; the design of the needle holder platform lifting device improves the operation method and enhances the efficiency of testing. Mainly used in semiconductor industry as well as optoelectronic industry testing. Widely used in the research and development of precision electrical measurement of complex, high-speed devices.

主要附件及配置

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